Parts For Sale LAM 02-321648-00 LAM 02-321648-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 02-321648-00 Manufacturer LAM Part Number 02-321648-00 Description ASSY, HDISIOC2, VECTOR Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other LAM Parts 853-031498-001 ASSY HEATER CARTRIDGE 100 WATTS (LOWER C 714-801511-002-G Liner, Mtg, PL ESC, Part of: Lam Versys 2300, PM3 713-057586-001 PLUG,RTD,THRM CTRL PL 713-028553-103 RING, CONFINEMENT, VESPEL 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 810-007215-001 PCB, POWER, DRIVER, BITS, 0-3 PCB 000-061 REV M 661-097953-001 UV Lamp, Microwave Strpr, Astex FI30005, Rev.E 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ...