Parts For Sale AXCELIS 66541 AXCELIS 66541 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66541 Manufacturer AXCELIS Part Number 66541 Description PLATE HANDLE MOUNT IRRAD Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other AXCELIS Parts 3300008 Thermocouple Vacuum Gauge Tube 11026870 ASSY SOURCE FLANGE GSD 200 170030780 Beam Stop 17097340 Feed Strap, Filament 17320560 PLATE, LINER 17156990 CATHODE/ARC WIRE ELS/IAS 7230-0003-0004 Standoff, 3/8D X 1/2L, 6-32 5/32Dp. 170174465 8452-0007-0001 EATON AXCELIS NOVA NV6200 AUTOCOOL WAFER COOLING CHASSIS ... 4400100 SCREW 6-32X1/2 S/H/C/S SST 170160061 170163417